Analysis of Multilayer Devices for Superconducting Electronics by High-Resolution Scanning Transmission Electron Microscopy and Energy Dispersive Spectroscopy

Journal Article · Wed Feb 15 00:00:00 EST 2017 · IEEE Transactions on Applied Superconductivity

DOI:https://doi.org/10.1109/tasc.2017.2669579· OSTI ID:1356860

Missert, Nancy  ^[1]; Kotula, Paul G. ^[1]; Rye, Michael ^[1]; Rehm, Laura ^[2]; Sluka, Volker ^[2]; Kent, Andrew D. ^[2]; Yohannes, Daniel ^[3]; Kirichenko, Alex F. ^[3]; Vernik, Igor V. ^[3]; Mukhanov, Oleg A. ^[3]; Bolkhovsky, Vladimir ^[4]; Wynn, Alex ^[4]; Johnson, Leonard ^[4]; Gouker, Mark ^[4]

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1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
2. New York Univ., NY (United States)
3. HYPRES Inc., Elmsford, NY (United States)
4. Massachusetts Inst. of Technology (MIT), Lexington, MA (United States). Lincoln Lab.

We used a focused ion beam to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). An automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE; Intelligence Advanced Research Projects Activity (IARPA)
• Grant/Contract Number: AC04-94AL85000
• OSTI ID: 1356860
• Report Number(s): SAND2017-4569J; 652917; TRN: US1702157
• Journal Information: IEEE Transactions on Applied Superconductivity, Vol. 27, Issue 4; ISSN 1051-8223
• Publisher: Institute of Electrical and Electronics Engineers (IEEE)
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
Josephson junctions
magnetic multilayers
superconducting materials
scanning transmission electron microscopy