How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high-reflection coatings

Field, Ella S.; Bellum, John C.; Kletecka, Damon E.

doi:10.1117/1.OE.56.1.011005

How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO₂/SiO₂ antireflection and high-reflection coatings

Journal Article · Fri Jul 15 00:00:00 EDT 2016 · Optical Engineering

DOI:https://doi.org/10.1117/1.OE.56.1.011005· OSTI ID:1356301

Field, Ella S. ^[1]; Bellum, John C. ^[1]; Kletecka, Damon E. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Here, optical coatings with the highest laser damage thresholds rely on clean conditions in the vacuum chamber during the coating deposition process. A low-base pressure in the coating chamber, as well as the ability of the vacuum system to maintain the required pressure during deposition, are important aspects of limiting the amount of defects in an optical coating that could induce laser damage. Our large optics coating chamber at Sandia National Laboratories normally relies on three cryo pumps to maintain low pressures for e-beam coating processes. However, on occasion, one or more of the cryo pumps have been out of commission. In light of this circumstance, we explored how deposition under compromised vacuum conditions resulting from the use of only one or two cryo pumps affects the laser-induced damage thresholds of optical coatings. The coatings of this study consist of HfO₂ and SiO₂ layer materials and include antireflection coatings for 527 nm at normal incidence and high-reflection coatings for 527 nm at 45-deg angle of incidence in P-polarization.

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1356301

Report Number(s):: SAND--2016-5601J; 653054

Journal Information:: Optical Engineering, Journal Name: Optical Engineering Journal Issue: 1 Vol. 56; ISSN 0091-3286

Publisher:: SPIECopyright Statement

Country of Publication:: United States

Language:: English

References (11)

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Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO ₂ , Nb ₂ O ₅ , or Ta ₂ O ₅ high index layers Field, Ella S.; Bellum, John C.; Kletecka, Damon E. SPIE Laser Damage, SPIE Proceedings https://doi.org/10.1117/12.2030068	conference	November 2013
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Cited By (1)

Effect of interfacial SiO2−y layer and defect in HfO2−x film on flat-band voltage of HfO2−x/SiO2−y stacks for backside-illuminated CMOS image sensors Na, Heedo; Lee, Jimin; Jeong, Juyoung Applied Physics A, Vol. 124, Issue 3 https://doi.org/10.1007/s00339-018-1659-5	journal	February 2018

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Related Subjects

36 MATERIALS SCIENCE
HFO2
SiO2
antireflection
high reflection
laser damage
optical coatings
vacuum