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Title: Method to fabricate micro and nano diamond devices

Patent ·
OSTI ID:1351066
; ; ; ;

A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation
Patent Number(s):
9,620,596
Application Number:
14/490,518
OSTI ID:
1351066
Resource Relation:
Patent File Date: 2014 Sep 18
Country of Publication:
United States
Language:
English

References (15)

Electric device with grains and an insulating layer patent July 1991
Microelectronic structure having an array of diamond structures on a nondiamond substrate and associated fabrication methods patent May 1995
Diamond film field effect transistor patent May 1997
Diamond cold cathode patent September 1997
All diamond self-aligned thin film transistor patent July 2008
Method of fabricating n-type semiconductor diamond, and semiconductor diamond patent January 2009
Large-area nanoenabled macroelectronic substrates and uses therefor patent-application April 2005
Semiconductor nano-rod devices patent-application June 2005
All diamond self-aligned thin film transistor patent-application March 2006
Methods of Making Nanowires patent-application August 2013
High-performance lithium battery anodes using silicon nanowires journal December 2007
Efficient hybrid density functional calculations in solids: Assessment of the Heyd–Scuseria–Ernzerhof screened Coulomb hybrid functional journal July 2004
Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond
  • Hickey, D. P.; Kuryliw, E.; Siebein, K.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 24, Issue 4, p. 1302-1307 https://doi.org/10.1116/1.2209659
journal July 2006
Focused ion beam patterning of diamondlike carbon films journal July 1999
Fabrication of GaN-based nanoscale device structures utilizing focused ion beam induced Pt deposition journal July 2006

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