Comparative Study of Hot-Wire Chemical Vapor Deposition onto (100) Si Near 600 ..deg..C: Epitaxial and Polycrystalline Silicon Films
Conference
·
OSTI ID:1345480
- Research Organization:
- NREL (National Renewable Energy Laboratory (NREL), Golden, CO (United States))
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC36-08GO28308
- OSTI ID:
- 1345480
- Report Number(s):
- NREL/CP-520-42940
- Country of Publication:
- United States
- Language:
- English
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