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U.S. Department of Energy
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Comparative Study of Hot-Wire Chemical Vapor Deposition onto (100) Si Near 600 ..deg..C: Epitaxial and Polycrystalline Silicon Films

Conference ·
OSTI ID:1345480

Research Organization:
NREL (National Renewable Energy Laboratory (NREL), Golden, CO (United States))
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-08GO28308
OSTI ID:
1345480
Report Number(s):
NREL/CP-520-42940
Country of Publication:
United States
Language:
English