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Title: Rapid evaluation of particle properties using inverse SEM simulations

Abstract

The characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations of SEM-EDS spectra to enable rapid determination of sample properties, particularly elemental composition. This is accomplished using penORNL, a modified version of PENELOPE, and a modified version of the traditional Levenberg Marquardt nonlinear optimization algorithm, which together is referred to as MOZAIK-SEM. The overall conclusion of this work is that MOZAIK-SEM is a promising method for performing inverse analysis of X-ray spectra generated within a SEM. As this methodology exists now, MOZAIK-SEM has been shown to calculate the elemental composition of an unknown sample within a few percent of the actual composition.

Authors:
 [1];  [1];  [1];  [1]
  1. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1339398
DOE Contract Number:
AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Conference: ICRS Meeting, Paris, France, 20161003, 20161007
Country of Publication:
United States
Language:
English

Citation Formats

Bekar, Kursat B, Miller, Thomas Martin, Patton, Bruce W, and Weber, Charles F. Rapid evaluation of particle properties using inverse SEM simulations. United States: N. p., 2017. Web.
Bekar, Kursat B, Miller, Thomas Martin, Patton, Bruce W, & Weber, Charles F. Rapid evaluation of particle properties using inverse SEM simulations. United States.
Bekar, Kursat B, Miller, Thomas Martin, Patton, Bruce W, and Weber, Charles F. Sun . "Rapid evaluation of particle properties using inverse SEM simulations". United States. doi:.
@article{osti_1339398,
title = {Rapid evaluation of particle properties using inverse SEM simulations},
author = {Bekar, Kursat B and Miller, Thomas Martin and Patton, Bruce W and Weber, Charles F},
abstractNote = {The characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations of SEM-EDS spectra to enable rapid determination of sample properties, particularly elemental composition. This is accomplished using penORNL, a modified version of PENELOPE, and a modified version of the traditional Levenberg Marquardt nonlinear optimization algorithm, which together is referred to as MOZAIK-SEM. The overall conclusion of this work is that MOZAIK-SEM is a promising method for performing inverse analysis of X-ray spectra generated within a SEM. As this methodology exists now, MOZAIK-SEM has been shown to calculate the elemental composition of an unknown sample within a few percent of the actual composition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2017},
month = {Sun Jan 01 00:00:00 EST 2017}
}

Conference:
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  • This report is the final deliverable of a 3 year project whose purpose was to investigate the possibility of using simulations of X-ray spectra generated inside a scanning electron microscope (SEM) as a means to perform quantitative analysis of the sample imaged in the SEM via an inverse analysis methodology. Using the nine point Technology Readiness Levels (TRL) typically used by the US Department of Defense (DOD) and the National Aeronautics and Space Administration (NASA), this concept is now at a TRL of 3. In other words, this work has proven the feasibility of this concept and is ready tomore » be further investigated to address some of the issues highlighted by this initial proof of concept.« less
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