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Title: Rapid evaluation of particle properties using inverse SEM simulations

Abstract

The characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations of SEM-EDS spectra to enable rapid determination of sample properties, particularly elemental composition. This is accomplished using penORNL, a modified version of PENELOPE, and a modified version of the traditional Levenberg Marquardt nonlinear optimization algorithm, which together is referred to as MOZAIK-SEM. The overall conclusion of this work is that MOZAIK-SEM is a promising method for performing inverse analysis of X-ray spectra generated within a SEM. As this methodology exists now, MOZAIK-SEM has been shown to calculate the elemental composition of an unknown sample within a few percent of the actual composition.

Authors:
 [1];  [1];  [1];  [1]
  1. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1339398
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Conference
Resource Relation:
Conference: ICRS Meeting, Paris, France, 20161003, 20161007
Country of Publication:
United States
Language:
English

Citation Formats

Bekar, Kursat B, Miller, Thomas Martin, Patton, Bruce W, and Weber, Charles F. Rapid evaluation of particle properties using inverse SEM simulations. United States: N. p., 2017. Web.
Bekar, Kursat B, Miller, Thomas Martin, Patton, Bruce W, & Weber, Charles F. Rapid evaluation of particle properties using inverse SEM simulations. United States.
Bekar, Kursat B, Miller, Thomas Martin, Patton, Bruce W, and Weber, Charles F. Sun . "Rapid evaluation of particle properties using inverse SEM simulations". United States. doi:.
@article{osti_1339398,
title = {Rapid evaluation of particle properties using inverse SEM simulations},
author = {Bekar, Kursat B and Miller, Thomas Martin and Patton, Bruce W and Weber, Charles F},
abstractNote = {The characteristic X-rays produced by the interactions of the electron beam with the sample in a scanning electron microscope (SEM) are usually captured with a variable-energy detector, a process termed energy dispersive spectrometry (EDS). The purpose of this work is to exploit inverse simulations of SEM-EDS spectra to enable rapid determination of sample properties, particularly elemental composition. This is accomplished using penORNL, a modified version of PENELOPE, and a modified version of the traditional Levenberg Marquardt nonlinear optimization algorithm, which together is referred to as MOZAIK-SEM. The overall conclusion of this work is that MOZAIK-SEM is a promising method for performing inverse analysis of X-ray spectra generated within a SEM. As this methodology exists now, MOZAIK-SEM has been shown to calculate the elemental composition of an unknown sample within a few percent of the actual composition.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 01 00:00:00 EST 2017},
month = {Sun Jan 01 00:00:00 EST 2017}
}

Conference:
Other availability
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