Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor

Luan, P.; Knoll, A. J.; Wang, H.; Kondeti, V. K.; Bruggeman, P. J.; Oehrlein, G. S.

doi:10.1088/1361-6463/aa4e97

Title: Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor

Journal Article · Tue Dec 13 00:00:00 EST 2016 · Journal of Physics. D, Applied Physics

DOI:https://doi.org/10.1088/1361-6463/aa4e97· OSTI ID:1659744

Luan, P. ^[1]; Knoll, A. J. ^[1]; Wang, H. ^[1]; Kondeti, V. K. ^[2]; Bruggeman, P. J. ^[2]; Oehrlein, G. S. ^[1]

University of Maryland, College Park, MD (United States)
University of Minnesota, Minneapolis, MN (United States)

The surface interaction of a well-characterized time modulated radio frequency (RF) plasma jet with polystyrene, poly(methyl methacrylate) and poly(vinyl alcohol) as model polymers is investigated. The RF plasma jet shows fast polymer etching but mild chemical modification with a characteristic carbonate ester and NO formation on the etched surface. By varying the plasma treatment conditions including feed gas composition, environment gaseous composition, and treatment distance, we find that short lived species, especially atomic O for Ar/1% O2 and 1% air plasma and OH for Ar/1% H2O plasma, play an essential role for polymer etching. For O2 containing plasma, we find that atomic O initiates polymer etching and the etching depth mirrors the measured decay of O atoms in the gas phase as the nozzlesurface distance increases. The etching reaction probability of an O atom ranging from 10-4 to 10-3 is consistent with low pressure plasma research. We also find that adding O2 and H2O simultaneously into Ar feed gas quenches polymer etching compared to adding them separately which suggests the reduction of O and OH density in Ar/O2/H2O plasma.

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Research Organization:: Univ. of Maryland, College Park, MD (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES); National Science Foundation (NSF)

Grant/Contract Number:: SC0001939; PHY-1415353

OSTI ID:: 1659744

Alternate ID(s):: OSTI ID: 1335531; OSTI ID: 1787988

Journal Information:: Journal of Physics. D, Applied Physics, Vol. 50, Issue 3; ISSN 0022-3727

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 28 works

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70 PLASMA PHYSICS AND FUSION TECHNOLOGY
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Title: Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor

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