Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion

Ubnoske, Stephen M.; Radauscher, Erich J.; Meshot, Eric R.; Stoner, Brian R.; Parker, Charles B.; Glass, Jeffrey T.

doi:10.1016/j.carbon.2016.11.047

Integrating carbon nanotube forests into polysilicon MEMS: Growth kinetics, mechanisms, and adhesion

Journal Article · Fri Nov 18 23:00:00 EST 2016 · Carbon

DOI:https://doi.org/10.1016/j.carbon.2016.11.047· OSTI ID:1332934

^[1]; ^[2]; Meshot, Eric R. ^[3]; Stoner, Brian R. ^[4]; Parker, Charles B. ^[2]; Glass, Jeffrey T. ^[2]

Duke Univ., Durham, NC (United States); U.S. Naval Research Laboratory
Duke Univ., Durham, NC (United States)
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Research Triangle Institute (RTI) International, Durham, NC (United States)

The growth of carbon nanotubes (CNTs) on polycrystalline silicon substrates was studied to improve the design of CNT field emission sources for microelectromechanical systems (MEMS) applications and vacuum microelectronic devices (VMDs). Microwave plasma-enhanced chemical vapor deposition (PECVD) was used for CNT growth, resulting in CNTs that incorporate the catalyst particle at their base. The kinetics of CNT growth on polysilicon were compared to growth on Si (100) using the model of Deal and Grove, finding activation energies of 1.61 and 1.54 eV for the nucleation phase of growth and 1.90 and 3.69 eV for the diffusion-limited phase on Si (100) and polysilicon, respectively. Diffusivity values for growth on polysilicon were notably lower than the corresponding values on Si (100) and the growth process became diffusion-limited earlier. Evidence favors a surface diffusion growth mechanism involving diffusion of carbon precursor species along the length of the CNT forest to the catalyst at the base. Explanations for the differences in activation energies and diffusivities were elucidated by SEM analysis of the catalyst nanoparticle arrays and through wide-angle X-ray scattering (WAXS) of CNT forests. As a result, methods are presented to improve adhesion of CNT films during operation as field emitters, resulting in a 2.5× improvement.

View Accepted Manuscript (DOE)

Research Organization:: Duke Univ., Durham, NC (United States)

Sponsoring Organization:: USDOE Advanced Research Projects Agency - Energy (ARPA-E)

Grant/Contract Number:: AR0000546

OSTI ID:: 1332934

Alternate ID(s):: OSTI ID: 1398682

Journal Information:: Carbon, Journal Name: Carbon; ISSN 0008-6223

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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