MEMS component reliability testing.

Conference · Fri Apr 01 00:00:00 EDT 2011

OSTI ID:1288876

Lopez, John Robert; Buchheit, Thomas Edward; Kudiya, Abdul; Potter-Shields, Judy; Clements, James W.; Thompson, Rachelle; Benavidez, Christina; Bitsie, Fernando; Johnson, Evan P.; Spletzer, Matthew A.

Abstract not provided.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1288876
• Report Number(s): SAND2011-2223C; 479825
• Country of Publication: United States
• Language: English