Bounded PIC-MCC simulation of an electgronegative RF discharge

Journal Article · Tue Dec 01 04:00:00 EST 1992 · Bulletin of the American Physical Society

OSTI ID:127972

Vahedi, V; Lieberman, M A; Birdsall, C K ^[1]

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1. Univ. of California, Berkeley, CA (United States); and others

The authors have developed a Monte Carlo Collision (MCC) scheme, as an addition to the Particle-in-Cell (PIC) method, to study oxygen RF discharges. The presence of negative ions and their effect on the plasma is being investigated at various pressures and input powers. Simulation results show that for low input powers, the negative ion density can be an order of magnitude higher than the electron density. This high concentration of negative ions affects the ambipolar diffusion conditions which can lead to lower ion loss rates and higher ion densities than in electropositive discharges. In this model, electrons, O{sub 2}{sup +}, O{sup {minus}}, and O are evolved as particles. These models can be used to model other processing discharges.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 127972
• Report Number(s): CONF-920376--; CNN: Grant ECS-8910827
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 9 Vol. 37; ISSN BAPSA6; ISSN 0003-0503
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ANIONS
COMPUTERIZED SIMULATION
HIGH-FREQUENCY DISCHARGES
MONTE CARLO METHOD
OXYGEN