Evolution of crystal structure during the initial stages of ZnO atomic layer deposition

Boichot, R.; Tian, L.; Richard, M. -I.; Crisci, A.; Chaker, A.; Cantelli, V.; Coindeau, S.; Lay, S.; Ouled, T.; Guichet, C.; Fong, D. D.; Blanquet, E.; Deschanvres, J. -L.; Renevier, H.; Chu, M. H.; Aubert, N.; Ciatto, G.; Thomas, O.

doi:10.1021/acs.chemmater.5b04223

Evolution of crystal structure during the initial stages of ZnO atomic layer deposition

Journal Article · Tue Jan 05 00:00:00 EST 2016 · Chemistry of Materials

DOI:https://doi.org/10.1021/acs.chemmater.5b04223· OSTI ID:1248882

Boichot, R. ^[1]; Tian, L. ^[1]; Richard, M. -I. ^[2]; Crisci, A. ^[1]; Chaker, A. ^[1]; Cantelli, V. ^[1]; Coindeau, S. ^[1]; Lay, S. ^[1]; Ouled, T. ^[3]; Guichet, C. ^[3]; Fong, D. D. ^[4]; Blanquet, E. ^[1]; Deschanvres, J. -L. ^[1]; Renevier, H. ^[1]; Chu, M. H. ^[5]; Aubert, N. ^[5]; Ciatto, G. ^[5]; Thomas, O. ^[3]

Univ. of Grenoble Alpes, Grenoble (France)
Aix-Marseille Univ., and CNRS/IN2P3, Marseille (France); European Synchrotron Radiation Facility, Grenoble (France)
Aix-Marseille Univ., and CNRS/IN2P3, Marseille (France)
Argonne National Lab. (ANL), Argonne, IL (United States)
Synchrotron SOLEIL - Beamline SIRIUS, Gif sur Yvette (France)

In this study, a complementary suite of in situ synchrotron X-ray techniques is used to investigate both structural and chemical evolution during ZnO growth by atomic layer deposition. Focusing on the first 10 cycles of growth, we observe that the structure formed during the coalescence stage largely determines the overall microstructure of the film. Furthermore, by comparing ZnO growth on silicon with a native oxide with that on Al₂O₃(001), we find that even with lattice-mismatched substrates and low deposition temperatures, the crystalline texture of the films depend strongly on the nature of the interfacial bonds.

View Accepted Manuscript (DOE)

Research Organization:: Argonne National Lab. (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1248882

Journal Information:: Chemistry of Materials, Journal Name: Chemistry of Materials Journal Issue: 2 Vol. 28; ISSN 0897-4756

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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