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SEM Resolution Improvement Using Semi-Blind Restoration with Hybrid L1-L2 Regularization

Conference · Thu Mar 17 00:00:00 EDT 2016

DOI:https://doi.org/10.1109/SSIAI.2016.7459168· OSTI ID:1242918

Lin, Youzuo ^[1]; Kandel, Yudhishthir ^[2]; Zotta, Matthew ^[2]; Lifshin, Eric ^[2]

Los Alamos National Laboratory
Colleges of Nanoscale Science and Engineering, State University of New York, Polytechnic Institute

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Research Organization:: Los Alamos National Laboratory (LANL)

Sponsoring Organization:: 0000

DOE Contract Number:: AC52-06NA25396

OSTI ID:: 1242918

Report Number(s):: LA-UR-16-21811

Country of Publication:: United States

Language:: English

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