Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation

Fuchs, Silvio; Rödel, Christian; Blinne, Alexander; Zastrau, Ulf; Wünsche, Martin; Hilbert, Vinzenz; Glaser, Leif; Viefhaus, Jens; Frumker, Eugene; Corkum, Paul; Förster, Eckhart; Paulus, Gerhard G.

doi:10.1038/srep20658

Title: Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft x-ray radiation

Journal Article · Wed Feb 10 00:00:00 EST 2016 · Scientific Reports

DOI:https://doi.org/10.1038/srep20658· OSTI ID:1240088

Fuchs, Silvio ^[1]; Rödel, Christian ^[2]; Blinne, Alexander ^[3]; Zastrau, Ulf ^[3]; Wünsche, Martin ^[1]; Hilbert, Vinzenz ^[3]; Glaser, Leif ^[4]; Viefhaus, Jens ^[4]; Frumker, Eugene ^[5]; Corkum, Paul ^[6]; Förster, Eckhart ^[1]; Paulus, Gerhard G. ^[1]

Friedrich-Schiller-Univ. Jena, Jena (Germany); Helmholtz-Institute Jena, Jena (Germany)
Friedrich-Schiller-Univ. Jena, Jena (Germany); SLAC National Accelerator Lab., Menlo Park, CA (United States)
Friedrich-Schiller-Univ. Jena, Jena (Germany)
Deutsches Elektronen-Synchrotron (DESY), Hamburg (Germany)
National Research Council of Canada, Ottawa, ON (Canada); Ben-Gurion Univ., Beer-Sheva (Israel)
National Research Council of Canada, Ottawa, ON (Canada)

Optical coherence tomography (OCT) is a non-invasive technique for cross-sectional imaging. It is particularly advantageous for applications where conventional microscopy is not able to image deeper layers of samples in a reasonable time, e.g. in fast moving, deeper lying structures. However, at infrared and optical wavelengths, which are commonly used, the axial resolution of OCT is limited to about 1 μm, even if the bandwidth of the light covers a wide spectral range. Here, we present extreme ultraviolet coherence tomography (XCT) and thus introduce a new technique for non-invasive cross-sectional imaging of nanometer structures. XCT exploits the nanometerscale coherence lengths corresponding to the spectral transmission windows of, e.g., silicon samples. The axial resolution of coherence tomography is thus improved from micrometers to a few nanometers. Tomographic imaging with an axial resolution better than 18 nm is demonstrated for layer-type nanostructures buried in a silicon substrate. Using wavelengths in the water transmission window, nanometer-scale layers of platinum are retrieved with a resolution better than 8 nm. As a result, XCT as a nondestructive method for sub-surface tomographic imaging holds promise for several applications in semiconductor metrology and imaging in the water window.

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Research Organization:: SLAC National Accelerator Laboratory (SLAC), Menlo Park, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC)

Grant/Contract Number:: AC03-76SF00515

OSTI ID:: 1240088

Journal Information:: Scientific Reports, Vol. 6; ISSN 2045-2322

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 27 works

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References (30)

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Optical coherence tomography (OCT) with 2 nm axial resolution using a compact laser plasma soft X-ray source Wachulak, Przemysław; Bartnik, Andrzej; Fiedorowicz, Henryk Scientific Reports, Vol. 8, Issue 1 https://doi.org/10.1038/s41598-018-26909-0	journal	May 2018
A high resolution extreme ultraviolet spectrometer system optimized for harmonic spectroscopy and XUV beam analysis Wünsche, Martin; Fuchs, Silvio; Weber, Thomas Review of Scientific Instruments, Vol. 90, Issue 2 https://doi.org/10.1063/1.5054116	journal	February 2019
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Optical sectioning in induced coherence tomography with frequency-entangled photons Vallés, Adam; Jiménez, Gerard; Salazar-Serrano, Luis José Physical Review A, Vol. 97, Issue 2 https://doi.org/10.1103/physreva.97.023824	journal	February 2018
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