Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Indentation-derived elastic modulus of multilayer thin films: Effect of unloading induced plasticity

Journal Article · · Journal of Materials Research
DOI:https://doi.org/10.1557/jmr.2015.200· OSTI ID:1235302
 [1];  [2]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  2. Univ. of New Mexico, Albuquerque, NM (United States)

Nanoindentation is useful for evaluating the mechanical properties, such as elastic modulus, of multilayer thin film materials. A fundamental assumption in the derivation of the elastic modulus from nanoindentation is that the unloading process is purely elastic. In this work, the validity of elastic assumption as it applies to multilayer thin films is studied using the finite element method. The elastic modulus and hardness from the model system are compared to experimental results to show validity of the model. Plastic strain is shown to increase in the multilayer system during the unloading process. Additionally, the indentation-derived modulus of a monolayer material shows no dependence on unloading plasticity while the modulus of the multilayer system is dependent on unloading-induced plasticity. Lastly, the cyclic behavior of the multilayer thin film is studied in relation to the influence of unloading-induced plasticity. Furthermore, it is found that several cycles are required to minimize unloading-induced plasticity.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1235302
Report Number(s):
SAND--2015-1003J; 566971
Journal Information:
Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 15 Vol. 30; ISSN 0884-2914
Publisher:
Materials Research SocietyCopyright Statement
Country of Publication:
United States
Language:
English

Similar Records

An Approximate Formulation of the Effective Indentation Modulus of Elastically Anisotropic Film-on-Substrate Systems
Journal Article · Wed Dec 31 23:00:00 EST 2008 · International Journal of Applied Mechanics (IJAM) · OSTI ID:1004979

An explanation for the shape of nanoindentation unloading curves based on finite element simulation
Conference · Fri Mar 31 23:00:00 EST 1995 · OSTI ID:35341

Response of solids to elastic/plastic indentation and the application of indentation to adhesion measurements
Technical Report · Sat Feb 28 23:00:00 EST 1981 · OSTI ID:6592795