Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

First Principle Simulation of Diffraction based Metrology Techniques

Technical Report ·
DOI:https://doi.org/10.2172/1227984· OSTI ID:1227984
 [1];  [1];  [1];  [1];  [1];  [1];  [2]
  1. Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
  2. Company X, Albuquerque, NM (United States)
This report is a summary of the work performed by SNL in regards to light diffraction techniques.
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1227984
Report Number(s):
SAND2015--8794R; 614709
Country of Publication:
United States
Language:
English