Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

Anders, André

doi:10.1063/1.4904713

Title: Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering

Journal Article · Tue Dec 16 00:00:00 EST 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4904713· OSTI ID:1226614

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Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA

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Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-05CH11231

OSTI ID:: 1226614

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 105 Journal Issue: 24; ISSN 0003-6951

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 47 works

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References (26)

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Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering Anders, André; Panjan, Matjaž; Franz, Robert Applied Physics Letters, Vol. 103, Issue 14 https://doi.org/10.1063/1.4823827	journal	September 2013
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Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering Anders, André; Ni, Pavel; Rauch, Albert Journal of Applied Physics, Vol. 111, Issue 5 https://doi.org/10.1063/1.3692978	journal	March 2012
Internal current measurements in high power impulse magnetron sputtering Lundin, Daniel; Sahab, Seham Al; Brenning, Nils Plasma Sources Science and Technology, Vol. 20, Issue 4 https://doi.org/10.1088/0963-0252/20/4/045003	journal	May 2011
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Plasma flares in high power impulse magnetron sputtering Ni, Pavel A.; Hornschuch, Christian; Panjan, Matjaž Applied Physics Letters, Vol. 101, Issue 22 https://doi.org/10.1063/1.4768925	journal	November 2012
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