Analytic expressions for atomic layer deposition: Coverage, throughput, and materials utilization in cross-flow, particle coating, and spatial atomic layer deposition

Journal Article · Thu May 01 00:00:00 EDT 2014 · Journal of Vacuum Science & Technology A

DOI:https://doi.org/10.1116/1.4867441· OSTI ID:1210314

Yanguas-Gil, Angel; Elam, Jeffrey W.

• Research Organization: Energy Frontier Research Centers (EFRC) (United States). Argonne-Northwestern Solar Energy Research Center (ANSER)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• DOE Contract Number: SC0001059
• OSTI ID: 1210314
• Journal Information: Journal of Vacuum Science & Technology A, Vol. 32; Related Information: ANSER partners with Northwestern University (lead); Argonne National Laboratory; University of Chicago; University of Illinois, Urbana-Champaign; Yale University
• Country of Publication: United States
• Language: English

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