Surface and Interface Properties of 10–12 Unit Cells Thick Sputter Deposited Epitaxial CeO ₂ Films

Journal Article · Tue Jan 01 00:00:00 EST 2008 · Research Letters in Materials Science

DOI:https://doi.org/10.1155/2008/206019· OSTI ID:1198286

Saraf, L. V. ^[1]; Wang, C. M. ^[1]; Engelhard, M. H. ^[1]; Nachimuthu, P. ^[1]

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1. Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, Richland WA 99352, USA

Ultrathin and continuous epitaxial films with relaxed lattice strain can potentially maintain more of its bulk physical and chemical properties and are useful as buffer layers. We study surface, interface, and microstructural properties of ultrathin ( $\sim$ 10–12 unit cells thick) epitaxial ceria films grown on single crystal YSZ substrates. The out-of -plane and in-plane lattice parameters indicate relaxation in the continuous film due to misfit dislocations seen by high-resolution transmission electron microscopy (HRTEM) and substrate roughness of $\sim$ 1-2 unit cells, confirmed by atomic force microscopy and HRTEM. A combination of secondary sputtering, lattice mismatch, substrate roughness, and surface reduction creating secondary phase was likely the cause of surface roughness which should be reduced to a minimum level for effective use of it as buffer layers.

• Sponsoring Organization: USDOE Office of Science (SC), Biological and Environmental Research (BER)
• Grant/Contract Number: AC06-76RLO1830; AC06-76RL01830
• OSTI ID: 1198286
• Journal Information: Research Letters in Materials Science, Journal Name: Research Letters in Materials Science Vol. 2008; ISSN 1687-6822
• Publisher: Hindawi Publishing Corporation
• Country of Publication: Country unknown/Code not available
• Language: English