Plastic Deformation in Profile-Coated Elliptical KB Mirrors

Liu, Chian; Conley, R.; Qian, J.; Kewish, C. M.; Liu, W.; Assoufid, L.; Macrander, A. T.; Ice, G. E.; Tischler, J. Z.

doi:10.5402/2012/151092

Plastic Deformation in Profile-Coated Elliptical KB Mirrors

Journal Article · Tue Sep 04 04:00:00 EDT 2012 · ISRN Optics

DOI:https://doi.org/10.5402/2012/151092· OSTI ID:1197880

Liu, Chian ^[1]; Conley, R. ^[2]; Qian, J. ^[1]; Kewish, C. M. ^[3]; Liu, W. ^[1]; Assoufid, L. ^[1]; Macrander, A. T. ^[1]; Ice, G. E. ^[4]; Tischler, J. Z. ^[1]

X-ray Science Division, Argonne National Laboratory, Argonne, IL 60439, USA
National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
Synchrotron Soleil, BP 48 Saint-Aubin, 91192 Gif-sur-Yvette, France
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA

Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.

View Journal Article

Sponsoring Organization:: USDOE

Grant/Contract Number:: AC02-06CH11357

OSTI ID:: 1197880

Alternate ID(s):: OSTI ID: 1052266

Journal Information:: ISRN Optics, Journal Name: ISRN Optics Vol. 2012; ISSN 2090-7826

Publisher:: Hindawi (International Scholarly Research Network)Copyright Statement

Country of Publication:: Egypt

Language:: English

References (15)

Low Temperature, High Stress Plastic Deformation of Semiconductors: The Silicon Case Rabier, J.; Demenet, J. L. physica status solidi (b), Vol. 222, Issue 1 https://doi.org/10.1002/1521-3951(200011)222:1<63::AID-PSSB63>3.0.CO;2-E	journal	November 2000
Stress-related effects in thin films Thornton, John A.; Hoffman, D. W. Thin Solid Films, Vol. 171, Issue 1 https://doi.org/10.1016/0040-6090(89)90030-8	journal	April 1989
Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing Liu, Chian; Ice, G. E.; Liu, W. Applied Surface Science, Vol. 258, Issue 6 https://doi.org/10.1016/j.apsusc.2011.02.079	journal	January 2012
Thermal stresses in the reflective x-ray optics for the Linac Coherent Light Source Ryutov, D. D. Review of Scientific Instruments, Vol. 74, Issue 8 https://doi.org/10.1063/1.1590747	journal	August 2003
From Flat Substrate to Elliptical KB Mirror by Profile Coating Liu, Chian SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings https://doi.org/10.1063/1.1757893	conference	January 2004
Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe Liu, Wenjun; Ice, Gene E.; Tischler, Jonathan Z. Review of Scientific Instruments, Vol. 76, Issue 11 https://doi.org/10.1063/1.2125730	journal	November 2005
The Tension of Metallic Films Deposited by Electrolysis Stoney, G. G. Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 82, Issue 553 https://doi.org/10.1098/rspa.1909.0021	journal	May 1909
Comparison of Thermal Behavior of Vacuum-Crushed, Air-Crushed, and Mechanically Polished Silicon Surfaces by Electron Paramagnetic Resonance Haneman, D.; Chung, M. F.; Taloni, A. Physical Review, Vol. 170, Issue 3 https://doi.org/10.1103/PhysRev.170.719	journal	June 1968
Diffusion in a Single Crystal within a Stressed Environment Cowern, N. E. B. Physical Review Letters, Vol. 99, Issue 15 https://doi.org/10.1103/PhysRevLett.99.155903	journal	October 2007
Achromatic nested Kirkpatrick–Baez mirror optics for hard X-ray nanofocusing Liu, Wenjun; Ice, Gene E.; Assoufid, Lahsen Journal of Synchrotron Radiation, Vol. 18, Issue 4 https://doi.org/10.1107/S0909049511010995	journal	May 2011
Profile coating and its application for Kirkpatrick-Baez mirrors Liu, Chian Optical Engineering, Vol. 42, Issue 12 https://doi.org/10.1117/1.1625381	journal	December 2003
Physics of loose abrasive microgrinding Golini, Donald; Jacobs, Stephen D. Applied Optics, Vol. 30, Issue 19 https://doi.org/10.1364/AO.30.002761	journal	January 1991
Wave-optical simulation of hard-x-ray nanofocusing by precisely figured elliptical mirrors Kewish, Cameron M.; Assoufid, Lahsen; Macrander, Albert T. Applied Optics, Vol. 46, Issue 11 https://doi.org/10.1364/AO.46.002010	journal	January 2007
On the Figuring and Correcting of Mirrors by Controlled Deposition of Aluminum1 Strong, John; Gaviola, E. Journal of the Optical Society of America, Vol. 26, Issue 4 https://doi.org/10.1364/JOSA.26.000153	journal	January 1936
Residual stress and microstructure of as-deposited and annealed, sputtered yttria-stabilized zirconia thin films Quinn, David J.; Wardle, Brian; Spearing, S. Mark Journal of Materials Research, Vol. 23, Issue 3 https://doi.org/10.1557/JMR.2008.0077	journal	March 2008

Similar Records

From Flat Substrate to Elliptical KB Mirror by Profile Coating

Journal Article · Wed May 12 00:00:00 EDT 2004 · AIP Conference Proceedings · OSTI ID:20653047

Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing

Journal Article · Sat Dec 31 23:00:00 EST 2011 · Applied Surface Science · OSTI ID:1039642

Plastic Deformation in Profile-Coated Elliptical KB Mirrors

Citation Formats

References (15)

Similar Records

Related Subjects