A study of density in electron-cyclotron-resonance plasma
- Naval Surface Warfare Center, Silver Spring, MD (United States)
- Korea Advanced Institute of Science and Technology, Taejon (Korea, Republic of). Dept. of Physics
A theory is developed for the density profile of low-temperature plasmas confined by applied magnetic field and an experiment of the electron-cyclotron-resonance (ECR) plasma is conducted to compare the theoretical prediction and experimental measurements. Due to a large electron mobility along the magnetic field, electrons move quickly out of the system, leaving ions behind and building a space charge potential, which leads to the ambipolar diffusion of ions. In a steady-state condition, the plasma generation by ionization of neutral molecules is in balance with plasma loss due to the diffusion, leading to the electron temperature equation, which is expressed in terms of the plasma size, chamber pressure, and the ionization energy and cross section of neutrals. The power balance condition leads to the plasma density equation, which is also expressed in terms of the electron temperature, the input microwave power and the chamber pressure. It is shown that the plasma density increases, reaches its peak and decreases, as the chamber pressure increases from a small value (0.1 mTorr). These simple expressions of electron temperature and density provide a scaling law of ECR plasma in terms of system parameters. After carrying out an experimental observation, it is concluded that the theoretical predictions of the electron temperature and plasma density agree remarkably well with experimental data. A large-volume plasma generated by the electron-cyclotron-resonance (ECR) mechanism plays a pivotal role in the plasma processing, including thin-film depositions and plasma etching technologies.
- OSTI ID:
- 118909
- Journal Information:
- IEEE Transactions on Plasma Science, Vol. 23, Issue 4; Other Information: PBD: Aug 1995
- Country of Publication:
- United States
- Language:
- English
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