skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Semiconductive micro- and nano-wire array manufacturing

Abstract

The disclosure provides methods of manufacturing semiconductive structures using stamping and VLS techniques.

Inventors:
; ;
Publication Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1183341
Patent Number(s):
9,048,097
Application Number:
13/972,809
Assignee:
California Institute of Technology (Pasadena, CA)
DOE Contract Number:  
FG02-05ER15754
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
14 SOLAR ENERGY; 36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Warren, Emily L., Audesirk, Heather A., and Lewis, Nathan S. Semiconductive micro- and nano-wire array manufacturing. United States: N. p., 2015. Web.
Warren, Emily L., Audesirk, Heather A., & Lewis, Nathan S. Semiconductive micro- and nano-wire array manufacturing. United States.
Warren, Emily L., Audesirk, Heather A., and Lewis, Nathan S. 2015. "Semiconductive micro- and nano-wire array manufacturing". United States. https://www.osti.gov/servlets/purl/1183341.
@article{osti_1183341,
title = {Semiconductive micro- and nano-wire array manufacturing},
author = {Warren, Emily L. and Audesirk, Heather A. and Lewis, Nathan S.},
abstractNote = {The disclosure provides methods of manufacturing semiconductive structures using stamping and VLS techniques.},
doi = {},
url = {https://www.osti.gov/biblio/1183341}, journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {6}
}

Works referenced in this record:

Generic nano-imprint process for fabrication of nanowire arrays
journal, January 2010


Nanostructure formation via print diffusion etching through block copolymer templates
journal, January 2010


Fabrication nano-pillars pattern on PDMS using anodic aluminum oxide film as template
conference, March 2012


Hybrid Nanoimprint−Soft Lithography with Sub-15 nm Resolution
journal, June 2009