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Title: The fundamental downscaling limit of field effect transistors

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4919871· OSTI ID:1179740

We predict that within next 15 years a fundamental down-scaling limit for CMOS technology and other Field-Effect Transistors (FETs) will be reached. Specifically, we show that at room temperatures all FETs, irrespective of their channel material, will start experiencing unacceptable level of thermally induced errors around 5-nm gate lengths. Our findings were confirmed by performing quantum mechanical transport simulations for a variety of 6-, 5-, and 4-nm gate length Si devices, optimized to satisfy high-performance logic specifications by ITRS. Furthermore, different channel materials and wafer/channel orientations have also been studied; it is found that altering channel-source-drain materials achieves only insignificant increase in switching energy, which overall cannot sufficiently delay the approaching downscaling limit. Alternative possibilities are discussed to continue the increase of logic element densities for room temperature operation below the said limit.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
Grant/Contract Number:
AC04-94AL85000
OSTI ID:
1179740
Alternate ID(s):
OSTI ID: 1214578; OSTI ID: 1235268; OSTI ID: 1420512
Report Number(s):
SAND-2015-2229J
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Vol. 106 Journal Issue: 19; ISSN 0003-6951
Publisher:
American Institute of PhysicsCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 56 works
Citation information provided by
Web of Science

References (1)

Irreversibility and Heat Generation in the Computing Process journal July 1961

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