Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Spatial-heterodyne interferometry for transmission (SHIFT) measurements

Patent ·
OSTI ID:1175941
; ;
Systems and methods are described for spatial-heterodyne interferometry for transmission (SHIFT) measurements. A method includes digitally recording a spatially-heterodyned hologram including spatial heterodyne fringes for Fourier analysis using a reference beam, and an object beam that is transmitted through an object that is at least partially translucent; Fourier analyzing the digitally recorded spatially-heterodyned hologram, by shifting an original origin of the digitally recorded spatially-heterodyned hologram to sit on top of a spatial-heterodyne carrier frequency defined by an angle between the reference beam and the object beam, to define an analyzed image; digitally filtering the analyzed image to cut off signals around the original origin to define a result; and performing an inverse Fourier transform on the result.
Research Organization:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-00OR22725
Assignee:
UT-Battelle LLC (Oak Ridge, TN)
Patent Number(s):
7,119,905
Application Number:
10/649,251
OSTI ID:
1175941
Country of Publication:
United States
Language:
English

References (19)

Introduction to Electron Holography book January 1999
Holographic Interferometry book January 1994
Advanced electron holography: a new algorithm for image processing and a standardized quality test for the FEG electron microscope journal April 1995
The extended Fourier algorithm: Application in discrete optics and electron holography journal January 1994
Direct To Digital Holography For High Aspect Ratio Inspection of Semiconductor Wafers
  • Thomas, C. E. (Tommy)
  • CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology, AIP Conference Proceedings https://doi.org/10.1063/1.1622480
conference January 2003
Holographic Interferometry journal February 1966
Microscopy by reconstructed wave-fronts journal July 1949
A software package for the processing and reconstruction of electron holograms journal October 1995
High-resolution photomask transmission and phase measurement tool conference July 2002
Direct to digital holography for semiconductor wafer defect detection and review
  • Thomas, Jr., C. E.; Bahm, Tracy M.; Baylor, Larry R.
  • Design, Process Integration, and Characterization for Microelectronics, SPIE Proceedings https://doi.org/10.1117/12.475659
conference July 2002
Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms journal January 1999
Spatial filtering for zero-order and twin-image elimination in digital off-axis holography journal January 2000
Fracional–Fringe Holographic Plasma Interferometry journal January 1967
Reconstructed Wavefronts and Communication Theory* journal January 1962
Wavefront Reconstruction with Continuous-Tone Objects* journal January 1963
Wavefront Reconstruction with Diffused Illumination and Three-Dimensional Objects* journal January 1964
Direct phase determination in hologram interferometry with use of digitally recorded holograms journal January 1994
Digital holography for quantitative phase-contrast imaging journal January 1999
Holographic Interferometry Cookbook report January 1972

Similar Records

Spatial-Heterodyne Interferometry For Reflection And Transm Ission (Shirt) Measurements
Patent · Mon Feb 13 23:00:00 EST 2006 · OSTI ID:880162
Recording multiple spatially-heterodyned direct to digital holograms in one digital image
Patent · Tue Mar 25 00:00:00 EDT 2008 · OSTI ID:969777
Faster processing of multiple spatially-heterodyned direct to digital holograms
Patent · Tue Sep 09 00:00:00 EDT 2008 · OSTI ID:984950

Related Subjects

97 MATHEMATICS AND COMPUTING