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Title: Multilayer composites and manufacture of same

Patent ·
OSTI ID:1175638

The present invention is directed towards a process of depositing multilayer thin films, disk-shaped targets for deposition of multilayer thin films by a pulsed laser or pulsed electron beam deposition process, where the disk-shaped targets include at least two segments with differing compositions, and a multilayer thin film structure having alternating layers of a first composition and a second composition, a pair of the alternating layers defining a bi-layer wherein the thin film structure includes at least 20 bi-layers per micron of thin film such that an individual bi-layer has a thickness of less than about 100 nanometers.

Research Organization:
Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
W-7405-ENG-36
Assignee:
The Regents of the University of California (Los Alamos, NM)
Patent Number(s):
6,994,775
Application Number:
10/209,391
OSTI ID:
1175638
Country of Publication:
United States
Language:
English