Apparatus for generating partially coherent radiation
Patent
·
OSTI ID:1175247
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Number(s):
- 6,859,263
- Application Number:
- 10/377,947
- OSTI ID:
- 1175247
- Country of Publication:
- United States
- Language:
- English
Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
|
conference | June 1998 |
Modification of the coherence of undulator radiation
|
journal | February 1995 |
Similar Records
Apparatus for generating partially coherent radiation
Holographic illuminator for synchrotron-based projection lithography systems
Coherence techniques at extreme ultraviolet wavelengths
Patent
·
Tue Sep 28 00:00:00 EDT 2004
·
OSTI ID:1175247
Holographic illuminator for synchrotron-based projection lithography systems
Patent
·
Tue Aug 09 00:00:00 EDT 2005
·
OSTI ID:1175247
Coherence techniques at extreme ultraviolet wavelengths
Thesis/Dissertation
·
Tue Jan 01 00:00:00 EST 2002
·
OSTI ID:1175247