Apparatus for generating partially coherent radiation
Patent
·
OSTI ID:1175247
Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098;
- Assignee:
- EUV LLC (Santa Clara, CA)
- Patent Number(s):
- 6,859,263
- Application Number:
- 10/377,947
- OSTI ID:
- 1175247
- Country of Publication:
- United States
- Language:
- English
Modification of the coherence of undulator radiation
|
journal | February 1995 |
Characterization of the accuracy of EUV phase-shifting point diffraction interferometry
|
conference | June 1998 |
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