Method and system for ultra-precision positioning
An apparatus and method is disclosed for ultra-precision positioning. A slide base provides a foundational support. A slide plate moves with respect to the slide base along a first geometric axis. Either a ball-screw or a piezoelectric actuator working separate or in conjunction displaces the slide plate with respect to the slide base along the first geometric axis. A linking device directs a primary force vector into a center-line of the ball-screw. The linking device consists of a first link which directs a first portion of the primary force vector to an apex point, located along the center-line of the ball-screw, and a second link for directing a second portion of the primary force vector to the apex point. A set of rails, oriented substantially parallel to the center-line of the ball-screw, direct movement of the slide plate with respect to the slide base along the first geometric axis and are positioned such that the apex point falls within a geometric plane formed by the rails. The slide base, the slide plate, the ball-screw, and the linking device together form a slide assembly. Multiple slide assemblies can be distributed about a platform. In such a configuration, the platform may be raised and lowered, or tipped and tilted by jointly or independently displacing the slide plates.
- Research Organization:
- The Regents of the Univ. of California, Oakland, CA (United States); Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Number(s):
- 6,839,970
- Application Number:
- 10/150,560
- OSTI ID:
- 1175196
- Country of Publication:
- United States
- Language:
- English
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