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Title: Optical microspectrometer

Patent ·
OSTI ID:1174868

An optical microspectrometer comprises a grism to disperse the spectra in a line object. A single optical microspectrometer can be used to sequentially scan a planar object, such as a dye-tagged microchip. Because the optical microspectrometer is very compact, multiple optical microspectrometers can be arrayed to provide simultaneous readout across the width of the planar object The optical microspectrometer can be fabricated with lithographic process, such as deep X-ray lithography (DXRL), with as few as two perpendicular exposures.

Research Organization:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Number(s):
6,741,349
Application Number:
10/175,211
OSTI ID:
1174868
Country of Publication:
United States
Language:
English

References (6)

Selffocussing phase transmission grating for an integrated optical microspectrometer journal January 2001
Development Of A 10-Channel Wavelength Division Multiplexer/Demultiplexer Fabricated By An X-Ray Micromachining Process conference April 1989
Design considerations and performance of a spectro‐streak apparatus applying a planar LIGA microspectrometer for time‐resolved ultrafast fluorescence spectroscopy journal July 1996
Design and performance of a multiple element slab waveguide spectrograph for multimode fiber-optic WDM systems journal January 1993
Microspectrometer with slab-waveguide transmission gratings journal January 1996
Fabrication of a planar grating spectrograph by deep-etch lithography with synchrotron radiation journal May 1991