Polished polymide substrate
Patent
·
OSTI ID:1174329
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
- Research Organization:
- ~Individually Owned Patent
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- FG02-90ER81033
- Assignee:
- Farah, John; Sudarshanam, Venkatapuram S.
- Patent Number(s):
- 6,563,998
- Application Number:
- 09/292,432
- OSTI ID:
- 1174329
- Country of Publication:
- United States
- Language:
- English
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