Determining the Resolution Limits of Electron-Beam Lithography: Direct Measurement of the Point-Spread Function

Journal Article · Wed Aug 13 00:00:00 EDT 2014 · Nano Lett.

DOI:https://doi.org/10.1021/nl5013773· OSTI ID:1167836

Manfrinato, Vitor R.; Wen, Jianguo; Zhang, Lihua; Yang, Yujia; Hobbs, Richard G.; Baker, Bowen; Su, Dong; Zakharov, Dmitri; Zaluzec, Nestor J.; Miller, Dean J.; Stach, Eric A.; Berggren, Karl K.

• Research Organization: Energy Frontier Research Centers (EFRC) (United States). Center for Excitonics (CE)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• DOE Contract Number: SC0001088
• OSTI ID: 1167836
• Journal Information: Nano Lett., Vol. 14; Related Information: CE partners with Massachusetts Institute of Technology (lead); Brookhaven National Laboratory; Harvard University
• Country of Publication: United States
• Language: English

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