Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering

Journal Article · Thu Dec 11 00:00:00 EST 2014 · Applied Physics Letters

OSTI ID:1166997

Yang, Yuchen; Liu, Jason; Liu, Lin

Past research has revealed the propagation of dense, asymmetric ionization zones in both high and low current magnetron discharges. Here we report about the direction reversal of ionization zone propagation as observed with fast cameras. At high currents, zones move in the E B direction with velocities of 103 to 104 m/s. However at lower currents, ionization zones are observed to move in the opposite, the -E B direction, with velocities ~;; 103 m/s. It is proposed that the direction reversal is associated with the local balance of ionization and supply of neutrals in the ionization zone.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC)
• DOE Contract Number: DE-AC02-05CH11231
• OSTI ID: 1166997
• Report Number(s): LBNL-6872E
• Journal Information: Applied Physics Letters, Vol. 105, Issue 25
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
magnetron sputtering
plasma