HiPIMS: a New Generation of Film Deposition Techniques for SRF Applications
- JLAB
Over the years, Nb/Cu technology, despite its shortcomings due to the commonly used magnetron sputtering, has positioned itself as an alternative route for the future of accelerator superconducting structures. Avenues for the production of thin films tailored for Superconducting RF (SRF) applications are showing promise with recent developments in ionized PVD coating techniques, i.e. vacuum deposition techniques using energetic ions. Among these techniques, High power impulse magnetron sputtering (HiPIMS) is a promising emerging technique which combines magnetron sputtering with a pulsed power approach. This contribution describes the benefits of energetic condensation for SRF films and the characteristics of the HiPIMS technology. It describes the on-going efforts pursued in different institutions to exploit the potential of this technology to produce bulk-like Nb films and go beyond Nb performance with the development of film systems, based on other superconducting materials and multilayer structures.
- Research Organization:
- Thomas Jefferson National Accelerator Facility (TJNAF), Newport News, VA (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC)
- DOE Contract Number:
- AC05-06OR23177
- OSTI ID:
- 1164468
- Report Number(s):
- JLAB-ACC-13-1808; DOE/OR/23177-3238
- Resource Relation:
- Conference: SRF 2013, 23-27 Sept 2013. Paris, France
- Country of Publication:
- United States
- Language:
- English
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