Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition
- Research Organization:
- Energy Frontier Research Centers (EFRC) (United States). Center on Nanostructuring for Efficient Energy Conversion (CNEEC)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- DOE Contract Number:
- SC0001060
- OSTI ID:
- 1161739
- Journal Information:
- Thin Solid Films, Vol. 556; Related Information: CNEEC partners with Stanford University (lead); Carnegie Institution at Stanford; Technical University of Denmark
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thin film characterization of zinc tin oxide deposited by thermal atomic layer deposition
Correlating growth characteristics in atomic layer deposition with precursor molecular structure: the case of zinc tin oxide
Correlating Growth Characteristics in Atomic Layer Deposition with Precursor Molecular Structure: The Case of Zinc Tin Oxide
Journal Article
·
Tue Apr 01 00:00:00 EDT 2014
· Thin Solid Films
·
OSTI ID:1161739
+3 more
Correlating growth characteristics in atomic layer deposition with precursor molecular structure: the case of zinc tin oxide
Journal Article
·
Tue May 13 00:00:00 EDT 2014
· Chem. Mat.
·
OSTI ID:1161739
Correlating Growth Characteristics in Atomic Layer Deposition with Precursor Molecular Structure: The Case of Zinc Tin Oxide
Journal Article
·
Wed Apr 16 00:00:00 EDT 2014
· Chemistry of Materials
·
OSTI ID:1161739