High-precision micro/nano-scale machining system

Kapoor, Shiv G.; Bourne, Keith Allen; DeVor, Richard E.

Title: High-precision micro/nano-scale machining system

Patent · Tue Aug 19 00:00:00 EDT 2014

OSTI ID:1150741

Kapoor, Shiv G.; Bourne, Keith Allen; DeVor, Richard E.

A high precision micro/nanoscale machining system. A multi-axis movement machine provides relative movement along multiple axes between a workpiece and a tool holder. A cutting tool is disposed on a flexible cantilever held by the tool holder, the tool holder being movable to provide at least two of the axes to set the angle and distance of the cutting tool relative to the workpiece. A feedback control system uses measurement of deflection of the cantilever during cutting to maintain a desired cantilever deflection and hence a desired load on the cutting tool.

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Research Organization:: Univ. of Illinois at Urbana-Champaign, IL (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FG02-07ER46453; FG02-04ER46471

Assignee:: The Board of Trustees of the University of Illinois (Urbana, IL)

Patent Number(s):: 8,806,995

Application Number:: 12/877,863

OSTI ID:: 1150741

Country of Publication:: United States

Language:: English

References (20)

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