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IN-PLANEMEMS-BASED NANO-GACCELEROMETER WITH SUB-WAVELENGTH OPTICAL RESONANT SENSOR.

Journal Article · · Sensors & Actuators A: Physical
OSTI ID:1147339

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1147339
Report Number(s):
SAND2007-4577J; 522387
Journal Information:
Sensors & Actuators A: Physical, Journal Name: Sensors & Actuators A: Physical
Country of Publication:
United States
Language:
English

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