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U.S. Department of Energy
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Route to Production of Perforated Suspended Membranes.

Journal Article · · Journal of Vacuum Science and Technology B
OSTI ID:1146775

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1146775
Report Number(s):
SAND2007-6920J; 521125
Journal Information:
Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B
Country of Publication:
United States
Language:
English

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