Spatially resolved temperature mapping of electro-thermal actuators by surface Raman scattering.
Journal Article
·
· Journal of Microelectromechanical Systems (JMEMS)
OSTI ID:1145164
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1145164
- Report Number(s):
- SAND2005-4642J; 272347
- Journal Information:
- Journal of Microelectromechanical Systems (JMEMS), Journal Name: Journal of Microelectromechanical Systems (JMEMS)
- Country of Publication:
- United States
- Language:
- English
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