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Characterization of a MEMS liquid-vapor phase-change actuator with microcapillary wicks.

Journal Article · Thu Mar 31 23:00:00 EST 2005 · Journal of Microelectromechanical Systems (JMEMS)

DOI:https://doi.org/10.1115/IMECE2005-82564· OSTI ID:1145154

Whalen, Scott A.; Richards, C. D.; Bahr, David F.; Richards, R. F.

Abstract not provided.

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Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1145154

Report Number(s):: SAND2005-2571J; 272345

Journal Information:: Journal of Microelectromechanical Systems (JMEMS), Journal Name: Journal of Microelectromechanical Systems (JMEMS) Vol. 2005

Country of Publication:: United States

Language:: English

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