Metrology of 3D nanostructures.

Technical Report · Mon Oct 01 04:00:00 EDT 2012

DOI:https://doi.org/10.2172/1144015· OSTI ID:1144015

Barsic, Anthony; Piestun, Rafael; Boye, Robert R.

We propose a superresolution technique to resolve dense clusters of blinking emitters. The method relies on two basic assumptions: the emitters are statistically independent, and a model of the imaging system is known. We numerically analyze the performance limits of the method as a function of the emitter density and the noise level. Numerical simulations show that five closely packed emitters can be resolved and localized to a precision of 17nm. The experimental resolution of five quantum dots located within a diffraction limited spot confirms the applicability of this approach.

• Research Organization: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States); University of Colorado,, Boulder, CO
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 1144015
• Report Number(s): SAND2012-8966; 456463
• Country of Publication: United States
• Language: English