Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Effects of Mechanical Stress on Thermal Microactuator Performance.

Journal Article · · Journal of Micromechanics and Microengineering

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1143531
Report Number(s):
SAND2010-3000J; 492633
Journal Information:
Journal of Micromechanics and Microengineering, Journal Name: Journal of Micromechanics and Microengineering Journal Issue: 9 Vol. 20; ISSN 0960-1317
Country of Publication:
United States
Language:
English

Similar Records

Thermal Microactuator Performance as a Function of Mechanical Stress.
Conference · Mon Nov 30 23:00:00 EST 2009 · OSTI ID:1141309

Thermal Microactuator Performance at Varying Die Stresses.
Conference · Thu Nov 01 00:00:00 EDT 2012 · OSTI ID:1116139

Thermal Microactuators.
Conference · Thu Nov 01 00:00:00 EDT 2012 · OSTI ID:1116202

Related Subjects