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Light modulation with a nano-patterned diffraction grating and MEMS pixel.

Journal Article · Thu May 01 00:00:00 EDT 2008 · The Journal of Vacuum Science and Technology B

DOI:https://doi.org/10.1116/1.2998725· OSTI ID:1143383

Skinner, Jack L.; Talin, Albert Alec; Horsley, David A.

Abstract not provided.

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Research Organization:: Sandia National Laboratories (SNL-CA), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1143383

Report Number(s):: SAND2008-3428J; 517745

Journal Information:: The Journal of Vacuum Science and Technology B, Journal Name: The Journal of Vacuum Science and Technology B Journal Issue: 6 Vol. 26; ISSN 1071-1023

Country of Publication:: United States

Language:: English

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