TRIBOLOGICAL BEHAVIOR OF MICRON-SCALE POLYCRYSTALLINE SILICON STRUCTURAL FILMS IN AMBIENT AIR.
Conference
·
OSTI ID:1143082
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1143082
- Report Number(s):
- SAND2008-4542C; 516892
- Country of Publication:
- United States
- Language:
- English
Similar Records
TRIBOLOGICAL BEHAVIOR OF MICRON-SCALE POLYCRYSTALLINE SILICON STRUCTURAL FILMS IN AMBIENT AIR.
Nano-Scale Tribological Behavior of Polycrystalline Silicon Structural Films in Ambient Air.
Predicting Fracture in Micron-Scale Polycrystalline Silicon MEMS Structures.
Conference
·
Tue Jul 01 00:00:00 EDT 2008
·
OSTI ID:1143169
Nano-Scale Tribological Behavior of Polycrystalline Silicon Structural Films in Ambient Air.
Conference
·
Tue Apr 01 00:00:00 EDT 2008
·
OSTI ID:1145870
Predicting Fracture in Micron-Scale Polycrystalline Silicon MEMS Structures.
Conference
·
Sun May 01 00:00:00 EDT 2011
·
OSTI ID:1666333