Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers.
Journal Article
·
· Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers
OSTI ID:1143023
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1143023
- Report Number(s):
- SAND2008-5047J; 516776
- Journal Information:
- Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers, Journal Name: Post-CMOS Compatible Aluminum Nitride Resonant MEMS Accelerometers
- Country of Publication:
- United States
- Language:
- English
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