In-situ characterization of oxygen plasma surface etching/modification by Infrared-Visible Sum Frequency spectroscopy.
Conference
·
OSTI ID:1141406
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Laboratories,, Washington, D.C.
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1141406
- Report Number(s):
- SAND2006-5715C; 506550
- Resource Relation:
- Conference: Proposed for presentation at the Gasous Electronics Conference held October 10-13, 2006 in Columbus, OH.
- Country of Publication:
- United States
- Language:
- English
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