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U.S. Department of Energy
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In-situ characterization of oxygen plasma surface etching/modification by Infrared-Visible Sum Frequency spectroscopy.

Conference ·
OSTI ID:1141406

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States); Sandia National Laboratories,, Washington, D.C.
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1141406
Report Number(s):
SAND2006-5715C; 506550
Country of Publication:
United States
Language:
English

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