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Surface acoustic wave devices for harsh environment wireless sensing

Journal Article · · Sensors
DOI:https://doi.org/10.3390/s130606910· OSTI ID:1127089
 [1];  [1];  [1];  [2];  [2];  [1]
  1. National Energy Technology Lab. (NETL), Pittsburgh, PA, (United States); Carnegie Mellon Univ., Pittsburgh, PA (United States)
  2. National Energy Technology Lab. (NETL), Pittsburgh, PA, (United States)

In this study, langasite surface acoustic wave devices can be used to implement harsh environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.

Research Organization:
National Energy Technology Laboratory (NETL), Pittsburgh, PA, and Morgantown, WV (United States)
Sponsoring Organization:
USDOE Office of Fossil Energy (FE)
Grant/Contract Number:
FE0004000
OSTI ID:
1127089
Report Number(s):
A-UNIV-PUB--004
Journal Information:
Sensors, Journal Name: Sensors Journal Issue: 6 Vol. 13; ISSN SENSC9; ISSN 1424-8220
Publisher:
MDPI AGCopyright Statement
Country of Publication:
United States
Language:
English

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LGX pure shear horizontal SAW for liquid sensor applications journal October 2003
Platinum and palladium high-temperature transducers on langasite journal April 2005
Behavior of platinum/tantalum as interdigital transducers for SAW devices in high-temperature environments journal March 2011
High-temperature langasite SAW oxygen sensor journal August 2011
Langasite surface acoustic wave sensors: Fabrication and testing journal February 2012
A Wireless Surface Acoustic Wave Temperature Sensor Using Langasite as Substrate Material for High-Temperature Applications journal September 2003

Cited By (14)

Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum journal December 2015
Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors journal September 2016
SAW Sensors for Chemical Vapors and Gases journal April 2017
Design and Implementation of 2.45 GHz Passive SAW Temperature Sensors with BPSK Coded RFID Configuration journal August 2017
FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO2/Si Multilayer Structure journal May 2018
A Novel Surface Acoustic Wave Sensor Array Based on Wireless Communication Network journal September 2018
A LN/Si-Based SAW Pressure Sensor journal October 2018
Corrosion Sensors for Structural Health Monitoring of Oil and Natural Gas Infrastructure: A Review journal September 2019
Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity text January 2019
Zeolitic imidazolate framework-coated acoustic sensors for room temperature detection of carbon dioxide and methane journal January 2018
Disordered langasites La 3 Ga 5 MO 14  : Eu 3+ (M = Si, Ge, Ti) as red-emitting LED phosphors journal January 2018
Integrating microfluidics and biosensing on a single flexible acoustic device using hybrid modes journal January 2020
Fabrications of L-Band LiNbO3-Based SAW Resonators for Aerospace Applications journal May 2019
Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity journal May 2019

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