Surface acoustic wave devices for harsh environment wireless sensing

Greve, David W.; Chin, Tao -Lun; Zheng, Peng; Ohodnicki, Paul; Baltrus, John; Oppenheim, Irving J.

doi:10.3390/s130606910

Title: Surface acoustic wave devices for harsh environment wireless sensing

Journal Article · Fri May 24 00:00:00 EDT 2013 · Sensors

DOI:https://doi.org/10.3390/s130606910· OSTI ID:1127089

Greve, David W. ^[1]; Chin, Tao -Lun ^[1]; Zheng, Peng ^[1]; Ohodnicki, Paul ^[2]; Baltrus, John ^[2]; Oppenheim, Irving J. ^[1]

National Energy Technology Lab. (NETL), Pittsburgh, PA, (United States); Carnegie Mellon Univ., Pittsburgh, PA (United States)
National Energy Technology Lab. (NETL), Pittsburgh, PA, (United States)

In this study, langasite surface acoustic wave devices can be used to implement harsh environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.

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Research Organization:: National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV (United States)

Sponsoring Organization:: USDOE Office of Fossil Energy (FE)

Grant/Contract Number:: FE0004000

OSTI ID:: 1127089

Report Number(s):: A-UNIV-PUB-004; SENSC9

Journal Information:: Sensors, Vol. 13, Issue 6; ISSN 1424-8220

Publisher:: MDPI AGCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 57 works

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Integrating microfluidics and biosensing on a single flexible acoustic device using hybrid modes Tao, Ran; Reboud, Julien; Torun, Hamdi Lab on a Chip, Vol. 20, Issue 5 https://doi.org/10.1039/c9lc01189g	journal	January 2020
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SAW Sensors for Chemical Vapors and Gases Devkota, Jagannath; Ohodnicki, Paul; Greve, David Sensors, Vol. 17, Issue 4 https://doi.org/10.3390/s17040801	journal	April 2017
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Surface Effects and Challenges for Application of Piezoelectric Langasite Substrates in Surface Acoustic Wave Devices Caused by High Temperature Annealing under High Vacuum Seifert, Marietta; Rane, Gayatri; Kirbus, Benjamin Materials, Vol. 8, Issue 12 https://doi.org/10.3390/ma8125497	journal	December 2015
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