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Title: Design of a Piezoresistive Surface Micromachined Three-Axis Force Transducer for Microassembly.

Conference ·
OSTI ID:1122179

Abstract not provided.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
DE-AC04-94AL85000
OSTI ID:
1122179
Report Number(s):
SAND2005-5170C; 504970
Resource Relation:
Conference: 2005 International Mechanical Engineering Conference and Exposition held November 5-11, 2005 in Orlando, FL.; Related Information: Proposed for presentation at the 2005 International Mechanical Engineering Conference and Exposition held November 5-11, 2005 in Orlando, FL.
Country of Publication:
United States
Language:
English