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Design of a Piezoresistive Surface Micromachined Three-Axis Force Transducer for Microassembly.

Conference ·
OSTI ID:1122179
 [1];  [1];  [1]; ;
  1. University of Florida, Gainesville, FL
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Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1122179
Report Number(s):
SAND2005-5170C; 504970
Country of Publication:
United States
Language:
English

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