Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions

Lu, Ping; Romero, Eric; Lee, Shinbuhm; MacManus-Driscoll, Judith L.; Jia, Quanxi

doi:10.1017/S1431927614013245

Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions

Journal Article · Mon Oct 13 00:00:00 EDT 2014 · Microscopy and Microanalysis

DOI:https://doi.org/10.1017/S1431927614013245· OSTI ID:1117575

Lu, Ping ^[1]; Romero, Eric ^[1]; Lee, Shinbuhm ^[2]; MacManus-Driscoll, Judith L. ^[2]; Jia, Quanxi ^[3]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Univ. of Cambridge (United Kingdom). Dept. of Materials Science and Metallurgy
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)

We report our effort to quantify atomic-scale chemical maps obtained by collecting energy-dispersive X-ray spectra (EDS) using scanning transmission electron microscopy (STEM) (STEM-EDS). Under a thin specimen condition and when the EDS scattering potential is localized, the X-ray counts from atomic columns can be properly counted by fitting Gaussian peaks at the atomic columns, and can then be used for site-by-site chemical quantification. The effects of specimen thickness and X-ray energy on the Gaussian peak-width are investigated by using SrTiO₃ (STO) as a model specimen. The relationship between the peak-width and spatial-resolution of an EDS map is also studied. Furthermore, the method developed by this work is applied to study a Sm-doped STO thin film and antiphase boundaries present within the STO film. We find that Sm atoms occupy both Sr and Ti sites but preferably the Sr sites, and Sm atoms are relatively depleted at the antiphase boundaries likely due to the effect of strain.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1117575

Alternate ID(s):: OSTI ID: 1321754

Report Number(s):: SAND--2013-9538J; 481152

Journal Information:: Microscopy and Microanalysis, Journal Name: Microscopy and Microanalysis Journal Issue: 06 Vol. 20; ISSN 1431-9276

Publisher:: Microscopy Society of America (MSA)Copyright Statement

Country of Publication:: United States

Language:: English

References (19)

Probing Interfacial Electronic Structures in Atomic Layer LaMnO3 and SrTiO3 Superlattices Shah, Amish B.; Ramasse, Quentin M.; Zhai, Xiaofang Advanced Materials, Vol. 22, Issue 10 https://doi.org/10.1002/adma.200904198	journal	February 2010
Transmission Electron Microscopy Williams, David B.; Carter, C. Barry https://doi.org/10.1007/978-0-387-76501-3	book	January 2009
An integrated Silicon Drift Detector System for FEI Schottky Field Emission Transmission Electron Microscopes Harrach, HS von; Dona, P.; Freitag, B. Microscopy and Microanalysis, Vol. 15, Issue S2 https://doi.org/10.1017/S1431927609094288	journal	July 2009
Challenges to Quantitative Multivariate Statistical Analysis of Atomic-Resolution X-Ray Spectral Kotula, Paul G.; Klenov, Dmitri O.; von Harrach, H. Sebastian Microscopy and Microanalysis, Vol. 18, Issue 4 https://doi.org/10.1017/S1431927612001201	journal	July 2012
Atomic-resolution chemical analysis using a scanning transmission electron microscope Browning, N. D.; Chisholm, M. F.; Pennycook, S. J. Nature, Vol. 366, Issue 6451 https://doi.org/10.1038/366143a0	journal	November 1993
Element-selective imaging of atomic columns in a crystal using STEM and EELS Kimoto, Koji; Asaka, Toru; Nagai, Takuro Nature, Vol. 450, Issue 7170 https://doi.org/10.1038/nature06352	journal	October 2007
Atomic-scale Chemical Imaging and Quantification of Metallic Alloy Structures by Energy-Dispersive X-ray Spectroscopy Lu, Ping; Zhou, Lin; Kramer, M. J. Scientific Reports, Vol. 4, Issue 1 https://doi.org/10.1038/srep03945	journal	February 2014
Structure of the InAlAs/InP interface by atomically resolved energy dispersive spectroscopy Klenov, Dmitri O.; Zide, Joshua M. O. Applied Physics Letters, Vol. 99, Issue 14 https://doi.org/10.1063/1.3645632	journal	October 2011
Atomic-scale chemical quantification of oxide interfaces using energy-dispersive X-ray spectroscopy Lu, Ping; Xiong, Jie; Van Benthem, Mark Applied Physics Letters, Vol. 102, Issue 17 https://doi.org/10.1063/1.4804184	journal	April 2013
Interpreting atomic-resolution spectroscopic images Oxley, M. P.; Varela, M.; Pennycook, T. J. Physical Review B, Vol. 76, Issue 6 https://doi.org/10.1103/PhysRevB.76.064303	journal	August 2007
Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy D’Alfonso, A. J.; Freitag, B.; Klenov, D. Physical Review B, Vol. 81, Issue 10 https://doi.org/10.1103/PhysRevB.81.100101	journal	March 2010
Contribution of thermally scattered electrons to atomic resolution elemental maps Forbes, B. D.; D'Alfonso, A. J.; Williams, R. E. A. Physical Review B, Vol. 86, Issue 2 https://doi.org/10.1103/PhysRevB.86.024108	journal	July 2012
Contrast Reversal in Atomic-Resolution Chemical Mapping Wang, P.; D’Alfonso, A. J.; Findlay, S. D. Physical Review Letters, Vol. 101, Issue 23 https://doi.org/10.1103/PhysRevLett.101.236102	journal	December 2008
Emergent Chemical Mapping at Atomic-Column Resolution by Energy-Dispersive X-Ray Spectroscopy in an Aberration-Corrected Electron Microscope Chu, M. -W.; Liou, S. C.; Chang, C. -P. Physical Review Letters, Vol. 104, Issue 19 https://doi.org/10.1103/PhysRevLett.104.196101	journal	May 2010
Quantitative Elemental Mapping at Atomic Resolution Using X-Ray Spectroscopy Kothleitner, G.; Neish, M. J.; Lugg, N. R. Physical Review Letters, Vol. 112, Issue 8 https://doi.org/10.1103/PhysRevLett.112.085501	journal	February 2014
Two-Dimensional Mapping of Chemical Information at Atomic Resolution Bosman, M.; Keast, V. J.; García-Muñoz, J. L. Physical Review Letters, Vol. 99, Issue 8 https://doi.org/10.1103/PhysRevLett.99.086102	journal	August 2007
The quantitative analysis of thin specimens Cliff, G.; Lorimer, G. W. Journal of Microscopy, Vol. 103, Issue 2 https://doi.org/10.1111/j.1365-2818.1975.tb03895.x	journal	March 1975
Atomic-Scale Chemical Imaging of Composition and Bonding by Aberration-Corrected Microscopy Muller, D. A.; Kourkoutis, L. F.; Murfitt, M. Science, Vol. 319, Issue 5866 https://doi.org/10.1126/science.1148820	journal	February 2008
Chemical mapping at atomic resolution using energy-dispersive x-ray spectroscopy Allen, Leslie J.; D’Alfonso, Adrian J.; Freitag, Bert MRS Bulletin, Vol. 37, Issue 1 https://doi.org/10.1557/mrs.2011.331	journal	January 2012

Cited By (6)

Direct Observation of Inherent Atomic-Scale Defect Disorders responsible for High-Performance Ti ₁₋ _x Hf _x NiSn ₁₋ _y Sb _y Half-Heusler Thermoelectric Alloys Kim, Ki Sung; Kim, Young-Min; Mun, Hyeona Advanced Materials, Vol. 29, Issue 36 https://doi.org/10.1002/adma.201702091	journal	July 2017
Metal Oxide Nanocomposites: A Perspective from Strain, Defect, and Interface Chen, Aiping; Su, Qing; Han, Hyungkyu Advanced Materials, Vol. 31, Issue 4 https://doi.org/10.1002/adma.201803241	journal	October 2018
Interface‐Driven Structural Distortions and Composition Segregation in Two‐Dimensional Heterostructures Ditto, Jeffrey; Merrill, Devin R.; Mitchson, Gavin Angewandte Chemie, Vol. 129, Issue 46 https://doi.org/10.1002/ange.201707270	journal	October 2017
Interface-Driven Structural Distortions and Composition Segregation in Two-Dimensional Heterostructures Ditto, Jeffrey; Merrill, Devin R.; Mitchson, Gavin Angewandte Chemie International Edition, Vol. 56, Issue 46 https://doi.org/10.1002/anie.201707270	journal	October 2017
Enhanced magnetism in lightly doped manganite heterostructures: strain or stoichiometry? Mbatang, Richard; Xue, Deqing; Enriquez, Erik Nanoscale, Vol. 11, Issue 15 https://doi.org/10.1039/c8nr09693g	journal	January 2019
Thermal degradation of refractory layered metamaterial for thermophotovoltaic emitter under high vacuum condition Kim, Jin Hwan; Jung, Sang Min; Shin, Moo Whan Optics Express, Vol. 27, Issue 3 https://doi.org/10.1364/oe.27.003039	journal	January 2019

Similar Records

Fast Atomic-Scale Elemental Mapping of Crystalline Materials by STEM Energy-Dispersive X-Ray Spectroscopy Achieved with Thin Specimens [Fast Atomic-Scale Chemical Imaging of Crystalline Materials by STEM Energy-Dispersive X-ray Spectroscopy Achieved with Thin Specimens].

Journal Article · Wed Feb 22 23:00:00 EST 2017 · Microscopy and Microanalysis · OSTI ID:1356226

Studies of x-ray localization and thickness dependence in atomic-scale elemental mapping by STEM energy-dispersive x-ray spectroscopy using single-frame scanning method

Journal Article · Wed Feb 28 23:00:00 EST 2018 · Ultramicroscopy · OSTI ID:1421612

Related Subjects

36 MATERIALS SCIENCE

Chemical Quantification of Atomic-Scale EDS Maps under Thin Specimen Conditions

Citation Formats

References (19)

Cited By (6)

Similar Records

Related Subjects