Realization of a 33 GHz phononic crystal fabricated in a freestanding membrane

Goettler, Drew F.; Su, Mehmet F.; Reinke, Charles M.; Alaie, Seyedhamidreza; Hopkins, Patrick E.; Olsson, III, Roy H.; El-Kady, Ihab; Leseman, Zayd C.

doi:10.1063/1.3676170

Realization of a 33 GHz phononic crystal fabricated in a freestanding membrane

Journal Article · Thu Dec 29 00:00:00 EST 2011 · AIP Advances

DOI:https://doi.org/10.1063/1.3676170· OSTI ID:1114946

Goettler, Drew F. ^[1]; Su, Mehmet F. ^[2]; Reinke, Charles M. ^[3]; Alaie, Seyedhamidreza ^[1]; Hopkins, Patrick E. ^[4]; Olsson, III, Roy H. ^[5]; El-Kady, Ihab ^[6]; Leseman, Zayd C. ^[1]

Department of Mechanical Engineering, University of New Mexico, Albuquerque, New Mexico, 87131, USA
Department of Mechanical Engineering, University of New Mexico, Albuquerque, New Mexico, 87131, USA, Department of Electrical Engineering, University of New Mexico, Albuquerque, New Mexico, 87131, USA
Department of Photonics Microsystems Technologies, Sandia National Laboratories, Albuquerque, New Mexico, 87185, USA
Department of Microscale Science and Technoloy, Sandia National Laboratories, Albuquerque, New Mexico, 87185, USA
Department of MEMS Technologies, Sandia National Laboratories, Albuquerque, New Mexico, 87185, USA
Department of Mechanical Engineering, University of New Mexico, Albuquerque, New Mexico, 87131, USA, Department of Electrical Engineering, University of New Mexico, Albuquerque, New Mexico, 87131, USA, Department of Photonics Microsystems Technologies, Sandia National Laboratories, Albuquerque, New Mexico, 87185, USA

Not Available

View Journal Article

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1114946

Journal Information:: AIP Advances, Journal Name: AIP Advances Journal Issue: 4 Vol. 1; ISSN AAIDBI; ISSN 2158-3226

Publisher:: American Institute of PhysicsCopyright Statement

Country of Publication:: United States

Language:: English

References (24)

A comparison of focused ion beam and electron beam induced deposition processes Lipp, S.; Frey, L.; Lehrer, C. Microelectronics Reliability, Vol. 36, Issue 11-12 https://doi.org/10.1016/0026-2714(96)00196-5	journal	November 1996
Trench formation and lateral damage induced by gallium milling of silicon Russo, Michael F.; Maazouz, Mostafa; Giannuzzi, Lucille A. Applied Surface Science, Vol. 255, Issue 4 https://doi.org/10.1016/j.apsusc.2008.05.083	journal	December 2008
Imaging Phonons Wolfe, James P. https://doi.org/10.1017/CBO9780511665424	book	January 1998
One-Dimensional Hypersonic Phononic Crystals Gomopoulos, N.; Maschke, D.; Koh, C. Y. Nano Letters, Vol. 10, Issue 3 https://doi.org/10.1021/nl903959r	journal	March 2010
The role of van der Waals forces in adhesion of micromachined surfaces DelRio, Frank W.; de Boer, Maarten P.; Knapp, James A. Nature Materials, Vol. 4, Issue 8 https://doi.org/10.1038/nmat1431	journal	July 2005
Observation and tuning of hypersonic bandgaps in colloidal crystals Cheng, Wei; Wang, Jianjun; Jonas, Ulrich Nature Materials, Vol. 5, Issue 10 https://doi.org/10.1038/nmat1727	journal	September 2006
Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers Wu, Tsung-Tsong; Wu, Liang-Chen; Huang, Zi-Gui Journal of Applied Physics, Vol. 97, Issue 9 https://doi.org/10.1063/1.1893209	journal	May 2005
Phononic band-gap crystals for radio frequency communications El-Kady, I.; Olsson, R. H.; Fleming, J. G. Applied Physics Letters, Vol. 92, Issue 23 https://doi.org/10.1063/1.2938863	journal	June 2008
Realization of a phononic crystal operating at gigahertz frequencies Su, M. F.; Olsson, R. H.; Leseman, Z. C. Applied Physics Letters, Vol. 96, Issue 5 https://doi.org/10.1063/1.3280376	journal	February 2010
Elastic waves in plates with periodically placed inclusions Sigalas, M. M.; Economou, E. N. Journal of Applied Physics, Vol. 75, Issue 6 https://doi.org/10.1063/1.356177	journal	March 1994
Theoretical study of three dimensional elastic band gaps with the finite-difference time-domain method Sigalas, M. M.; Garcı́a, N. Journal of Applied Physics, Vol. 87, Issue 6 https://doi.org/10.1063/1.372308	journal	March 2000
Catalytic growth rate enhancement of electron beam deposited iron films Kunz, R. R.; Mayer, T. M. Applied Physics Letters, Vol. 50, Issue 15 https://doi.org/10.1063/1.97999	journal	April 1987
Microfabricated phononic crystal devices and applications Olsson III, R. H.; El-Kady, I. Measurement Science and Technology, Vol. 20, Issue 1 https://doi.org/10.1088/0957-0233/20/1/012002	journal	November 2008
Recent developments in micromilling using focused ion beam technology Tseng, Ampere A. Journal of Micromechanics and Microengineering, Vol. 14, Issue 4, p. R15-R34 https://doi.org/10.1088/0960-1317/14/4/R01	journal	January 2004
Surface and bulk acoustic waves in two-dimensional phononic crystal consisting of materials with general anisotropy Wu, Tsung-Tsong; Huang, Zi-Gui; Lin, S. Physical Review B, Vol. 69, Issue 9 https://doi.org/10.1103/PhysRevB.69.094301	journal	March 2004
Evidence for complete surface wave band gap in a piezoelectric phononic crystal Benchabane, S.; Khelif, A.; Rauch, J. -Y. Physical Review E, Vol. 73, Issue 6 https://doi.org/10.1103/PhysRevE.73.065601	journal	June 2006
Hypersonic Phononic Crystals Gorishnyy, T.; Ullal, C. K.; Maldovan, M. Physical Review Letters, Vol. 94, Issue 11 https://doi.org/10.1103/PhysRevLett.94.115501	journal	March 2005
Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test Leseman, Zayd C.; Carlson, Steven P.; Mackin, Thomas J. Journal of Microelectromechanical Systems, Vol. 16, Issue 1 https://doi.org/10.1109/JMEMS.2006.883570	journal	February 2007
Modeling of focused ion beam induced surface chemistry Edinger, Klaus; Kraus, Thomas Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 6 https://doi.org/10.1116/1.1321761	journal	January 2000
Development of void-free focused ion beam-assisted metal deposition process for subhalf-micrometer high aspect ratio vias Ray, Valery; Antoniou, Nicholas; Bassom, Neil Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6 https://doi.org/10.1116/1.1621666	journal	January 2003
Focused ion beam induced deposition and ion milling as a function of angle of ion incidence Xu, Xin Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 10, Issue 6 https://doi.org/10.1116/1.586024	journal	November 1992
Mechanism of ion beam induced deposition of gold Ro, J. S. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 12, Issue 1 https://doi.org/10.1116/1.587111	journal	January 1994
Mathematical modeling of focused ion beam microfabrication Nassar, R. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 16, Issue 1 https://doi.org/10.1116/1.589763	journal	January 1998
Introduction to Phonons and Electrons Lou, Liang-fu World Scientific https://doi.org/10.1142/5327	book	August 2003

Similar Records

Realization of a 33 GHz Phononic Crystal Fabricated in a Freestanding Membrane.

Journal Article · Sun Aug 01 00:00:00 EDT 2010 · Realization of a 33 GHz Phononic Crystal Fabricated in a Freestanding Membrane · OSTI ID:1122618

Realization of a 33 GHz Phononic Crystal Fabricated in a Freestanding Membrane.

Journal Article · Sat Oct 01 00:00:00 EDT 2011 · American Institute of Physics (AIP) Advances · OSTI ID:1111744

Phononic crystals operating in the GHz range with extremely wide bandgaps.

Journal Article · Thu Apr 01 00:00:00 EDT 2010 · Applied Physics Letters · OSTI ID:1124212

Realization of a 33 GHz phononic crystal fabricated in a freestanding membrane

Citation Formats

References (24)

Similar Records

Related Subjects