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U.S. Department of Energy
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High Resolution at Low Voltages in the SEM: Resolution Measurement of a Monochromated SEM.

Journal Article · · Scanning
DOI:https://doi.org/10.1002/sca.20254· OSTI ID:1109024

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1109024
Report Number(s):
SAND2011-1642J; 471067
Journal Information:
Scanning, Journal Name: Scanning Journal Issue: 3 Vol. 33; ISSN 0161-0457
Country of Publication:
United States
Language:
English

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