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Title: Stable wafer-carrier system

Abstract

One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.

Inventors:
; ;
Publication Date:
Research Org.:
Silevo, Inc. (Fremont, CA)
Sponsoring Org.:
USDOE
OSTI Identifier:
1107612
Patent Number(s):
8,562,745
Application Number:
12/963,445
Assignee:
Silevo, Inc. (Fremont, CA)
DOE Contract Number:  
EE0000589
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Rozenzon, Yan, Trujillo, Robert T, and Beese, Steven C. Stable wafer-carrier system. United States: N. p., 2013. Web.
Rozenzon, Yan, Trujillo, Robert T, & Beese, Steven C. Stable wafer-carrier system. United States.
Rozenzon, Yan, Trujillo, Robert T, and Beese, Steven C. Tue . "Stable wafer-carrier system". United States. https://www.osti.gov/servlets/purl/1107612.
@article{osti_1107612,
title = {Stable wafer-carrier system},
author = {Rozenzon, Yan and Trujillo, Robert T and Beese, Steven C},
abstractNote = {One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {10}
}

Patent:

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