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Title: Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

Journal Article · · J Phys Chem C
DOI:https://doi.org/10.1021/jp401196f· OSTI ID:1105763

Research Organization:
Energy Frontier Research Centers (EFRC) (United States). Institute for Atom-efficient Chemical Transformations (IACT)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
DOE Contract Number:
AC02-06CH11357
OSTI ID:
1105763
Journal Information:
J Phys Chem C, Vol. 117; Related Information: IACT partners with Argonne National Laboratory (lead); Brookhaven National Laboratory; Northwestern University; Purdue University; University of Wisconsin at Madison
Country of Publication:
United States
Language:
English