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Mechanistic Study of Lithium Aluminum Oxide Atomic Layer Deposition

Journal Article · · J. Phys. Chem. C
DOI:https://doi.org/10.1021/jp308828p· OSTI ID:1105341

Research Organization:
Energy Frontier Research Centers (EFRC); Center for Electrical Energy Storage (CEES)
Sponsoring Organization:
USDOE SC Office of Basic Energy Sciences (SC-22)
DOE Contract Number:
AC02-06CH11357
OSTI ID:
1105341
Journal Information:
J. Phys. Chem. C, Journal Name: J. Phys. Chem. C Vol. 117
Country of Publication:
United States
Language:
English

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